spr956應用機型：ulvac、akt
spr951應用機型：akt
spr906應用機型：dns
spr903應用機型：dns
| 型式 | repair | overhaul | exchange |
| daihen spr956 |  | | |
| daihen spr951 | | | |
| daihen spr907 | | | |
| daihen spr906 | | | |
| daihen spr903 | | | |
| daihen spr902 | | | |
| daihen spr955 | | |
spr956應用機型：ulvac、akt
spr951應用機型：akt
spr906應用機型：dns
spr903應用機型：dns
| 型式 | repair | overhaul | exchange |
| daihen spr956 | | | |
| daihen spr951 | | | |
| daihen spr907 | | | |
| daihen spr906 | | | |
| daihen spr903 | | | |
| daihen spr902 | | | |
| daihen spr955 | | |